\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u7684\u6280\u8853\u7814\u7a76\u5718\u968a\u5728<\/em>IEDM 2024<\/em>\u5c55\u793a\u4e86\u9818\u5148\u696d\u754c\u7684\u5148\u9032\u96fb\u6676\u9ad4\u548c\u5c01\u88dd\u6280\u8853\uff0c\u6eff\u8db3\u672a\u4f86\u7684<\/em>AI<\/em>\u61c9\u7528\u9700\u6c42\u3002<\/em><\/em><\/p>\n\n\n\n

2024\u5e7412\u67089\u65e5\uff0d\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\uff08Intel Foundry\uff09\u57282024\u5e74IEEE\u570b\u969b\u96fb\u5b50\u5143\u4ef6\u6703\u8b70\uff08IEDM\uff09\u4e0a\u516c\u4f48\u4e86\u65b0\u7684\u7a81\u7834\uff0c\u6709\u52a9\u65bc\u63a8\u52d5\u534a\u5c0e\u9ad4\u7522\u696d\u9081\u5411\u4e0b\u4e00\u500b\u5341\u5e74\u53ca\u66f4\u9577\u9060\u7684\u672a\u4f86\u3002\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u5c55\u793a\u4e86\u6709\u52a9\u65bc\u6539\u5584\u6676\u7247\u5167\u4e92\u9023\u7684\u65b0\u6750\u6599\uff0c\u900f\u904e\u4f7f\u7528\u6e1b\u6750\u91d5\uff08subtractive Ruthenium\uff09\u63d0\u5347\u96fb\u6676\u9ad4\u5bb9\u91cf\u905425%^{1<\/sup>\u3002\u6b64\u5916\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u4f7f\u7528\u5148\u9032\u5c01\u88dd\u7684\u7570\u8cea\u6574\u5408\u89e3\u6c7a\u65b9\u6848\uff0c\u9996\u6b21\u8b93\u541e\u5410\u91cf\u63d0\u9ad8\u4e86100\u500d2<\/sup>\uff0c\u5be6\u73fe\u8d85\u5feb\u901f\u6676\u7247\u5c0d\u6676\u7247\u7d44\u88dd\u3002\u70ba\u4e86\u9032\u4e00\u6b65\u63a8\u52d5\u74b0\u7e5e\u5f0f\u9598\u6975\uff08GAA\uff09\u5fae\u7e2e\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u4e5f\u5c55\u793a\u4e86\u77fdRibbonFET CMOS\u548c\u7528\u65bc\u5fae\u7e2e2D FET\u7684\u9598\u6975\u6c27\u5316\u7269\u6a21\u7d44\u7684\u5de5\u4f5c\u6210\u679c\uff0c\u53ef\u63d0\u9ad8\u5143\u4ef6\u6548\u80fd\u3002<\/p>\n\n\n\n}

\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u8cc7\u6df1\u526f\u7e3d\u88c1\u66a8\u5143\u4ef6\u7814\u7a76\u90e8\u7e3d\u7d93\u7406Sanjay Natarajan\u8868\u793a\uff1a\u300c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u6301\u7e8c\u5b9a\u7fa9\u548c\u64d8\u5283\u534a\u5c0e\u9ad4\u7522\u696d\u7684\u767c\u5c55\u85cd\u5716\uff0c\u6700\u65b0\u7a81\u7834\u4e5f\u5f70\u986f\u4e86\u82f1\u7279\u723e\u81f4\u529b\u65bc\u958b\u767c\u9818\u5148\u6280\u8853\u7684\u627f\u8afe\u3002\u5728\u7f8e\u570b\u300a\u6676\u7247\u6cd5\u6848\u300b\uff08U.S. CHIPS Act.\uff09\u7684\u652f\u6301\u4e0b\uff0c\u82f1\u7279\u723e\u5c07\u6301\u7e8c\u5354\u52a9\u63d0\u5347\u5168\u7403\u4f9b\u61c9\u93c8\u7684\u5e73\u8861\u3002\u300d<\/p>\n\n\n\n

\u91cd\u8981\u6027\uff1a<\/strong>\u96a8\u8457\u534a\u5c0e\u9ad4\u7522\u696d\u76ee\u6a19\u65bc2030\u5e74\u5728\u55ae\u6676\u7247\u5bb9\u7d0d1\u5146\u500b\u96fb\u6676\u9ad4\uff0c\u96fb\u6676\u9ad4\u548c\u4e92\u9023\u5fae\u7e2e\u7684\u7a81\u7834\uff0c\u642d\u914d\u672a\u4f86\u7684\u5148\u9032\u5c01\u88dd\u80fd\u529b\uff0c\u5c0d\u65bc\u8b1b\u6c42\u80fd\u6e90\u6548\u7387\u3001\u9ad8\u6548\u80fd\u548c\u66f4\u5177\u6210\u672c\u6548\u76ca\u7684AI\u61c9\u7528\u81f3\u95dc\u91cd\u8981\u3002<\/p>\n\n\n\n

\u534a\u5c0e\u9ad4\u7522\u696d\u9700\u8981\u65b0\u7684\u6750\u6599\uff0c\u4ee5\u63d0\u5347\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u7684PowerVia\u6676\u7247\u80cc\u90e8\u4f9b\u96fb\u89e3\u6c7a\u65b9\u6848\uff0c\u7de9\u89e3\u4e92\u9023\u5bc6\u5ea6\u548c\u6301\u7e8c\u5fae\u7e2e\u7684\u58d3\u529b\uff0c\u9019\u662f\u5ef6\u7e8c\u6469\u723e\u5b9a\u5f8b\u4e26\u63a8\u52d5\u534a\u5c0e\u9ad4\u9032\u5165AI\u6642\u4ee3\u7684\u95dc\u9375\u3002<\/p>\n\n\n\n

\u5982\u4f55\u5be6\u73fe\uff1a<\/strong>\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u5df2\u7d93\u78ba\u7acb\u4e86\u591a\u7a2e\u9014\u5f91\uff0c\u53ef\u4ee5\u89e3\u6c7a\u9285\u96fb\u6676\u9ad4\u5728\u672a\u4f86\u7bc0\u9ede\u4e92\u9023\u5fae\u7e2e\u7684\u9810\u671f\u9650\u5236\uff0c\u63d0\u5347\u73fe\u6709\u7d44\u88dd\u6280\u8853\uff0c\u4e26\u7e7c\u7e8c\u5b9a\u7fa9\u548c\u898f\u5283\u7528\u65bc\u74b0\u7e5e\u5f0f\u9598\u6975\u5fae\u7e2e\u53ca\u672a\u4f86\u7684\u96fb\u6676\u9ad4\u767c\u5c55\u85cd\u5716\uff1a<\/p>\n\n\n\n

\n
• \u6e1b\u6750\u91d5\uff08<\/strong>Ru<\/strong>\uff09<\/strong>\uff1a\u70ba\u4e86\u63d0\u9ad8\u6676\u7247\u5167\u7684\u6548\u80fd\u548c\u4e92\u9023\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u5c55\u793a\u4e86\u6e1b\u6750\u91d5\uff0c\u9019\u662f\u4e00\u7a2e\u65b0\u7684\u95dc\u9375\u66ff\u4ee3\u91d1\u5c6c\u5316\u6750\u6599\uff0c\u4f7f\u7528\u8584\u819c\u96fb\u963b\u548c\u6c23\u9699\uff0c\u5728\u4e92\u9023\u5fae\u7e2e\u65b9\u9762\u53d6\u5f97\u91cd\u5927\u9032\u5c55\u3002\u8a72\u5718\u968a\u7387\u51483<\/sup>\u5728\u7814\u767c\u6e2c\u8a66\u5de5\u5177\u4e2d\u5c55\u793a\u4e86\u4e00\u7a2e\u5be6\u7528\u3001\u5177\u5099\u6210\u672c\u6548\u76ca\uff0c\u4e14\u9069\u7528\u65bc\u5927\u91cf\u751f\u7522\u7684\u6e1b\u6750\u91d5\u6574\u5408\u88fd\u7a0b\uff0c\u5176\u5177\u5099\u6c23\u9699\u7279\u6027\uff0c\u4e0d\u9700\u8981\u5728\u5b54\u6d1e\u5468\u570d\u4fdd\u7559\u5149\u523b\u6c23\u9699\u6392\u9664\u5340\uff0c\u4e5f\u4e0d\u9700\u8981\u9078\u64c7\u6027\u8755\u523b\u7684\u81ea\u5c0d\u6e96\u5b54\u6d1e\u3002\u63a1\u7528\u5177\u5099\u6c23\u9699\u7279\u6027\u7684\u6e1b\u6cd5\u91d5\uff0c\u53ef\u5728\u9593\u8ddd\u5c0f\u65bc\u6216\u7b49\u65bc25\u5948\u7c73\uff08nm\uff09\u6642\uff0c\u964d\u4f4e\u7dda\u9593\u96fb\u5bb9\u5e45\u5ea6\u9ad8\u905425%\uff0c\u51f8\u986f\u51fa\u91d1\u5c6c\u5316\u65b9\u6848\u7684\u6e1b\u6750\u91d5\u5728\u7dca\u5bc6\u9593\u8ddd\u4e2d\u66ff\u4ee3\u9285\u9472\u5d4c\u7684\u512a\u52e2\u3002\u6b64\u4e00\u89e3\u6c7a\u65b9\u6848\u5c07\u6703\u51fa\u73fe\u5728\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u7684\u672a\u4f86\u7bc0\u9ede\u4e2d\u3002<\/li>\n<\/ul>\n\n\n\n
  \n
  • \u9078\u64c7\u6027\u5c64\u9077\u79fb\uff08<\/strong>Selective Layer Transfer<\/strong>\uff0c<\/strong>SLT<\/strong>\uff09\uff1a<\/strong>\u70ba\u4e86\u5728\u5148\u9032\u5c01\u88dd\u4e2d\u5be6\u73fe\u8d85\u9ad8\u901f\u6676\u7247\u5c0d\u6676\u7247\u7684\u7d44\u88dd\uff0c\u8b93\u541e\u5410\u91cf\u63d0\u9ad8100\u500d\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u9996\u6b21\u5c55\u793a\u4e86\u9078\u64c7\u6027\u5c64\u9077\u79fb\u6280\u8853\uff08SLT\uff09\uff0c\u6b64\u4e00\u7570\u8cea\u6574\u5408\u89e3\u6c7a\u65b9\u6848\u8b93\u8d85\u8584\u5c0f\u6676\u7247\u5177\u6709\u66f4\u9ad8\u7684\u5f48\u6027\uff0c\u76f8\u8f03\u65bc\u50b3\u7d71\u7684\u6676\u7247\u5c0d\u6676\u5713\u9375\u5408\uff0c\u6676\u7c92\u5c3a\u5bf8\u53ef\u4ee5\u66f4\u5c0f\u3001\u6df1\u5bec\u6bd4\u66f4\u9ad8\uff0c\u9032\u4e00\u6b65\u5be6\u73fe\u66f4\u9ad8\u7684\u529f\u80fd\u5bc6\u5ea6\uff0c\u4e26\u70ba\u7279\u5b9a\u5c0f\u6676\u7247\u5f9e\u4e00\u500b\u6676\u5713\u5230\u53e6\u4e00\u500b\u6676\u5713\u7684\u6df7\u5408\u6216\u7194\u63a5\u9375\u5408\uff08Fusion bonding\uff09\u63d0\u4f9b\u66f4\u9748\u6d3b\u4e14\u66f4\u5177\u6210\u672c\u6548\u76ca\u7684\u89e3\u6c7a\u65b9\u6848\uff0c\u63d0\u9ad8AI\u61c9\u7528\u67b6\u69cb\u7684\u6548\u7387\u548c\u5f48\u6027\u3002<\/li>\n<\/ul>\n\n\n\n
    \n
    • \u77fd<\/strong>RibbonFET CMOS<\/strong>\uff1a<\/strong>\u70ba\u4e86\u5c07\u74b0\u7e5e\u5f0f\u9598\u6975RibbonFET\u77fd\u5fae\u7e2e\u63a8\u5411\u6975\u9650\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u5c55\u793a\u4e86\u9598\u6975\u9577\u5ea6\u70ba6\u5948\u7c73\u7684\u77fdRibbonFET CMOS\uff08\u4e92\u88dc\u91d1\u5c6c\u6c27\u5316\u7269\u534a\u5c0e\u9ad4\uff09\u96fb\u6676\u9ad4\uff0c\u5373\u4fbf\u5927\u5e45\u5fae\u7e2e\u9598\u6975\u9577\u5ea6\u548c\u901a\u9053\u539a\u5ea6\uff0c\u4ecd\u5177\u6709\u696d\u754c\u9818\u5148\u7684\u77ed\u901a\u9053\u6548\u61c9\u548c\u6548\u80fd\u3002\u7e2e\u77ed\u9598\u6975\u9577\u5ea6\u70ba\u6469\u723e\u5b9a\u5f8b\u7684\u95dc\u9375\u57fa\u77f3\u4e4b\u4e00\uff0c\u9019\u9805\u6280\u8853\u9032\u5c55\u70ba\u9598\u6975\u9577\u5ea6\u5fae\u7e2e\u5c55\u958b\u65b0\u9801\u3002<\/li>\n\n\n\n
    • \u7528\u65bc\u5fae\u7e2e<\/strong>GAA 2D FET<\/strong>\u7684\u9598\u6975\u6c27\u5316\u7269\uff1a<\/strong>\u70ba\u4e86\u9032\u4e00\u6b65\u52a0\u901f\u8d85\u8d8aCFET\u7684\u74b0\u7e5e\u5f0f\u9598\u6975\u5275\u65b0\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u5c55\u793a\u5176\u5728GAA 2D NMOS\u548cPMOS\u96fb\u6676\u9ad4\u88fd\u9020\u7684\u6210\u679c\uff0c\u9598\u6975\u9577\u5ea6\u7e2e\u5c0f\u81f330\u5948\u7c73\uff0c\u4e26\u7279\u5225\u5c08\u6ce8\u65bc\u9598\u6975\u6c27\u5316\u7269\uff08Gox\uff09\u6a21\u7d44\u7684\u958b\u767c\u3002\u9019\u9805\u7814\u7a76\u5448\u73fe\u4e86\u696d\u754c\u5c0d\u4e8c\u7dad\uff082D\uff09\u904e\u6e21\u91d1\u5c6c\u4e8c\u786b\u65cf\u5316\u7269\uff08TMD\uff09\u534a\u5c0e\u9ad4\u7684\u7814\u7a76\uff0c\u672a\u4f86\u53ef\u80fd\u5728\u5148\u9032\u96fb\u6676\u9ad4\u88fd\u7a0b\u4e2d\u53d6\u4ee3\u77fd\u3002<\/li>\n<\/ul>\n\n\n\n

      \u6b64\u5916\uff0c\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u7e7c\u7e8c\u63a8\u9032\u696d\u754c\u9996\u500b300\u6beb\u7c73\uff08mm\uff09\u6c2e\u5316\u93b5\uff08GaN\uff09\u6280\u8853\u7684\u7814\u7a76\uff0c\u9019\u662f\u4e00\u7a2e\u7528\u65bc\u529f\u7387\u4f9b\u96fb\u548c\u5c04\u983b\uff08RF\uff09\u96fb\u5b50\u7522\u54c1\u7684\u65b0\u8208\u6280\u8853\uff0c\u8207\u77fd\u76f8\u6bd4\uff0c\u53ef\u4ee5\u63d0\u4f9b\u66f4\u9ad8\u7684\u6548\u80fd\u4e26\u627f\u53d7\u66f4\u9ad8\u7684\u96fb\u58d3\u548c\u6eab\u5ea6\u3002\u9019\u662f\u696d\u754c\u9996\u6b3e\u5728300 mm GaN-on-TRSOI\uff08trap-rich silicon-on-insulator\uff09\u57fa\u677f\u4e0a\u88fd\u9020\u7684\u9ad8\u6548\u80fd\u5fae\u7e2e\u589e\u5f37\u578b\u6c2e\u5316\u93b5\u91d1\u5c6c\u6c27\u5316\u7269\u534a\u5c0e\u9ad4\u9ad8\u96fb\u5b50\u9077\u79fb\u7387\u96fb\u6676\u9ad4\uff08GaN MOSHEMT\uff09\u3002GaN-on-TRSOI\u5148\u9032\u8a2d\u8a08\u7684\u57fa\u677f\u53ef\u4ee5\u900f\u904e\u6e1b\u5c11\u8a0a\u865f\u640d\u8017\uff0c\u5be6\u73fe\u66f4\u597d\u7684\u8a0a\u865f\u7dda\u6027\u5ea6\uff0c\u4e26\u900f\u904e\u80cc\u9762\u57fa\u677f\u8655\u7406\u5be6\u73fe\u5148\u9032\u6574\u5408\u65b9\u6848\uff0c\u5728\u5c04\u983b\u548c\u529f\u7387\u96fb\u5b50\u7522\u54c1\u61c9\u7528\u4e2d\u9054\u6210\u66f4\u9ad8\u7684\u6548\u80fd\u3002<\/p>\n\n\n\n

      \u66f4\u591a\u65bc<\/strong>IEDM<\/strong>\u7684\u767c\u5e03\uff1a<\/strong>\u82f1\u7279\u723e\u6676\u5713\u4ee3\u5de5\u4e5f\u5728IEDM\u6703\u8b70\u4e2d\u95e1\u8ff0\u4e86\u5c0d\u5148\u9032\u5c01\u88dd\u548c\u96fb\u6676\u9ad4\u5fae\u7e2e\u7684\u672a\u4f86\u9858\u666f\uff0c\u4ee5\u6eff\u8db3\u5305\u62ecAI\u5728\u5167\u7684\u5404\u7a2e\u61c9\u7528\u9700\u6c42\uff0c\u4e26\u78ba\u7acb\u4e86\u4e09\u500b\u6280\u8853\u5275\u65b0\u7684\u95dc\u9375\u63a8\u52d5\u529b\uff0c\u4ee5\u5e6b\u52a9\u672a\u4f86\u7684AI\u66f4\u52a0\u7bc0\u80fd\u3002<\/p>\n\n\n\n

      \n
      • \u5148\u9032\u7684\u8a18\u61b6\u9ad4\u6574\u5408\u4ee5\u6d88\u9664\u5bb9\u91cf\u3001\u983b\u5bec\u548c\u5ef6\u9072\u74f6\u9838\u3002<\/li>\n\n\n\n
      • \u7528\u65bc\u4e92\u9023\u983b\u5bec\u6700\u4f73\u5316\u7684\u6df7\u5408\u9375\u5408\u3002<\/li>\n\n\n\n
      • \u5177\u6709\u76f8\u61c9\u9023\u63a5\u89e3\u6c7a\u65b9\u6848\u7684\u6a21\u7d44\u5316\u7cfb\u7d71\u64f4\u5145\u3002<\/li>\n<\/ul>\n\n\n\n

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