\u82f1\u7279\u723e\u65bc IEDM 2023 \u5c55\u793a\u7d50\u5408\u6676\u7247\u80cc\u90e8\u4f9b\u96fb\u548c\u76f4\u63a5\u80cc\u90e8\u63a5\u89f8\u7684 3D \u5806\u758a CMOS \u96fb\u6676\u9ad4
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\n
• \u82f1\u7279\u723e\u5728 IEDM 2023 \u4e0a\u516c\u5e03\u6700\u65b0\u96fb\u6676\u9ad4\u7814\u7a76\u6210\u679c\uff0c\u6210\u70ba\u696d\u754c\u9996\u5275\uff1a\u53ef\u5728\u5c0f\u81f360\u5948\u7c73\uff08nm\uff09\u7684\u5fae\u7e2e\u9598\u6975\u9593\u8ddd\uff0c\u5782\u76f4\u5806\u758a\u4e92\u88dc\u5834\u6548\u96fb\u6676\u9ad4\uff08Complementary Field Effect Transistors\uff0cCFET\uff09\u3002\u5806\u758a\u96fb\u6676\u9ad4\u53ef\u4ee5\u7e2e\u6e1b\u5143\u4ef6\u5360\u7528\u9762\u7a4d\uff0c\u9054\u5230\u6548\u80fd\u6700\u4f73\u5316\uff0c\u540c\u6642\u7d50\u5408\u80cc\u90e8\u4f9b\u96fb\u548c\u76f4\u63a5\u80cc\u90e8\u63a5\u89f8\u6280\u8853\uff0c\u51f8\u986f\u82f1\u7279\u723e\u5728\u74b0\u7e5e\u5f0f\u9598\u6975\u5834\u6548\u96fb\u6676\u9ad4\uff08Gate-All-Around FET\uff09\u9818\u57df\u7684\u9818\u5c0e\u5730\u4f4d\uff0c\u5c55\u73fe\u8d85\u8d8aRibbonFET\u7684\u5275\u65b0\u80fd\u529b\u3002<\/li>\n<\/ul>\n\n\n\n

  \u82f1\u7279\u723e\u7684\u9858\u666f\u4e0d\u53ea\u662f\u56db\u5e74\u4e94\u7bc0\u9ede\uff0c\u4e26\u78ba\u7acb\u4e86\u900f\u904e\u6676\u7247\u80cc\u90e8\u4f9b\u96fb\u7e7c\u7e8c\u5fae\u7e2e\u96fb\u6676\u9ad4\u898f\u6a21\u6240\u9700\u7684\u95dc\u9375\u7814\u767c\u9818\u57df\uff1a<\/p>\n\n\n\n

  \n
  • \u82f1\u7279\u723e\u7684PowerVia\u5c07\u65bc 2024 \u5e74\u91cf\u7522\uff0c\u662f\u6676\u7247\u80cc\u90e8\u4f9b\u96fb\u7684\u9996\u6ce2\u6210\u679c\u4e4b\u4e00\u3002\u5728IEDM 2023\u5927\u6703\u4e0a\uff0c\u82f1\u7279\u723e\u5143\u4ef6\u7814\u7a76\u5718\u968a\u78ba\u7acb\u4e86\u5728PowerVia\u4e4b\u5916\u5ef6\u4f38\u4e26\u64f4\u5c55\u6676\u7247\u80cc\u90e8\u96fb\u529b\u50b3\u8f38\u7684\u8def\u5f91\uff0c\u4ee5\u53ca\u5be6\u73fe\u9019\u4e9b\u76ee\u6a19\u6240\u9700\u7684\u95dc\u9375\u88fd\u7a0b\u9032\u5c55\u3002\u9019\u9805\u8a08\u756b\u66f4\u5f37\u8abf\u80cc\u90e8\u63a5\u89f8\u548c\u5176\u4ed6\u5275\u65b0\u5782\u76f4\u4e92\u9023\u7684\u4f7f\u7528\uff0c\u4ee5\u5be6\u73fe\u7bc0\u7701\u9762\u7a4d\u7684\u88dd\u7f6e\u5806\u758a\u3002<\/li>\n<\/ul>\n\n\n\n

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    \n
    • \u5728IEDM 2022 \u5927\u6703\u4e0a\uff0c\u82f1\u7279\u723e\u805a\u7126\u5728\u6027\u80fd\u589e\u5f37\u4e26\u5efa\u69cb\u901a\u5f80300 mm\u77fd\u57faGaN\u6676\u5713\u7684\u53ef\u884c\u65b9\u5f0f\u3002\u4eca\u5e74\uff0c\u82f1\u7279\u723e\u5728\u77fd\u548cGaN\u7684\u88fd\u7a0b\u6574\u5408\u65b9\u9762\u4e5f\u6709\u6240\u9032\u5c55\uff0c\u6210\u529f\u5c55\u793a\u4e00\u7a2e\u7528\u65bc\u96fb\u529b\u50b3\u8f38\u7684\u9ad8\u6548\u80fd\u3001\u5927\u898f\u6a21\u7a4d\u9ad4\u96fb\u8def\u89e3\u6c7a\u65b9\u6848\uff0c\u7a31\u4e4b\u70baDrGaN\u3002\u82f1\u7279\u723e\u7814\u7a76\u4eba\u54e1\u7387\u5148\u8b49\u660e\u6b64\u6280\u8853\u6027\u80fd\u826f\u597d\uff0c\u4e26\u6709\u53ef\u80fd\u4f7f\u96fb\u529b\u50b3\u8f38\u89e3\u6c7a\u65b9\u6848\u80fd\u8207\u6642\u4ff1\u9032\u3001\u7b26\u5408\u672a\u4f86\u904b\u7b97\u7684\u529f\u7387\u5bc6\u5ea6\u548c\u6548\u7387\u9700\u6c42\u3002<\/li>\n<\/ul>\n\n\n\n

      \u82f1\u7279\u723e\u63a8\u9032 2D \u96fb\u6676\u9ad4\u9818\u57df\u7684\u7814\u767c\uff0c\u5be6\u73fe\u672a\u4f86\u6469\u723e\u5b9a\u5f8b\u7684\u64f4\u5c55\uff1a<\/p>\n\n\n\n

      \n
      • \u904e\u6e21\u91d1\u5c6c\u4e8c\u786b\u5c6c\u5316\u7269\uff08TMD\uff092D\u901a\u9053\u6750\u6599\uff0c\u70ba\u7e2e\u5c0f\u96fb\u6676\u9ad4\u7269\u7406\u9598\u6975\u9577\u5ea6\u81f310nm \u4ee5\u4e0b\u5e36\u4f86\u7d55\u4f73\u6a5f\u6703\u3002\u5728IEDM 2023\u5927\u6703\u4e0a\uff0c\u82f1\u7279\u723e\u5c55\u793a\u7528\u65bcCMOS\u95dc\u9375\u5143\u4ef6NMOS\uff08n\u901a\u9053\u91d1\u5c6c\u6c27\u5316\u7269\u534a\u5c0e\u9ad4\uff09\u548cPMOS\uff08p \u901a\u9053\u91d1\u5c6c\u6c27\u5316\u7269\u534a\u5c0e\u9ad4\uff09\u7684\u9ad8\u9077\u79fb\u7387TMD\u96fb\u6676\u9ad4\u539f\u578b\u3002\u82f1\u7279\u723e\u4e5f\u5c55\u51fa\u4e16\u754c\u4e0a\u7b2c\u4e00\u500b\u74b0\u7e5e\u5f0f\u9598\u69752D TMD PMOS\u96fb\u6676\u9ad4\uff0c\u4ee5\u53ca\u4e16\u754c\u4e0a\u7b2c\u4e00\u500b\u5728 300 mm\u6676\u5713\u4e0a\u88fd\u9020\u76842D PMOS\u96fb\u6676\u9ad4\u3002<\/li>\n<\/ul>\n\n\n\n

        \u9032\u4e00\u6b65\u7d30\u7bc0\u53ef\u53c3\u8003\u82f1\u7279\u723e\u63a8\u51fa\u5168\u65b0RibbonFET\u8207PowerVia\u6280\u8853<\/a>\u4ecb\u7d39\u5f71\u7247\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

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